Optimizing the varied line-space grating with the curvature of grating substrate

Zhengkun Liu; Bin Liu; Xiangdong Xu; Ying Liu; Yilin Hong; Shaojun Fu D.V.M.

doi:10.1117/12.782893

21 November 2007 Optimizing the varied line-space grating with the curvature of grating substrate

Zhengkun Liu, Bin Liu, Xiangdong Xu, Ying Liu, Yilin Hong, Shaojun Fu D.V.M.

Proceedings Volume 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 67241I (2007) https://doi.org/10.1117/12.782893
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

Parameters of two spherical waves are firstly optimized to get the exact groove densities of diffractive gratings. Consequently, the groove density differences between on the plane and on the curved substrates are derived. Therefore, some experimental results are provided to demonstrate the validity of this method above. Meanwhile, the curvatures of the substrates are measured three times by using long trace profiler (LTP), which assures the repeatability of the bending technique for grating substrates. At last, the advantage of this method is exhibited through comparing the errors of grating groove density fabricated by this technique with only two spherical waves.

Citation Download Citation

Zhengkun Liu, Bin Liu, Xiangdong Xu, Ying Liu, Yilin Hong, and Shaojun Fu D.V.M. "Optimizing the varied line-space grating with the curvature of grating substrate", Proc. SPIE 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 67241I (21 November 2007); https://doi.org/10.1117/12.782893

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