Teracomputing for mask data preparation

John Nogatch; Hartmut Kirsch; Kamal Mostafa; Glenn Newell; Johnny Yeap

doi:10.1117/12.746776

30 October 2007 Teracomputing for mask data preparation

John Nogatch, Hartmut Kirsch, Kamal Mostafa, Glenn Newell, Johnny Yeap

Proceedings Volume 6730, Photomask Technology 2007; 67303G (2007) https://doi.org/10.1117/12.746776
Event: SPIE Photomask Technology, 2007, Monterey, California, United States

Abstract

Current and future Mask Data Preparation continues to see larger file sizes and longer processing times. Distributed processing using multiple processors provides more compute power, but file Input/Output time remains a significant portion of MDP processing. Data compression, fast disk storage, and fast network hardware are shown to provide some benefit, but are not sufficient for unlimited scalability. Most MDP file formats store pattern data in a single disk file, which creates a performance obstacle in the process flow. Dividing data into multiple files is shown to improve writing speed, and to facilitate pipelined execution of multistage process flows. The advantages, disadvantages, and system management of distributed files in the terabyte era are described.

Citation Download Citation

John Nogatch, Hartmut Kirsch, Kamal Mostafa, Glenn Newell, and Johnny Yeap "Teracomputing for mask data preparation", Proc. SPIE 6730, Photomask Technology 2007, 67303G (30 October 2007); https://doi.org/10.1117/12.746776

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