Applications of a MEMS scanner to profile measurement

Toru Yoshizawa; Toshitaka Wakayama; Hiroshi Takano

doi:10.1117/12.733048

10 October 2007 Applications of a MEMS scanner to profile measurement

Toru Yoshizawa, Toshitaka Wakayama, Hiroshi Takano

Proceedings Volume 6762, Two- and Three-Dimensional Methods for Inspection and Metrology V; 67620B (2007) https://doi.org/10.1117/12.733048
Event: Optics East, 2007, Boston, MA, United States

Abstract

We propose a compact measurement system for surface profilometry using a MEMS scanner. Beam from a LD is scanned by a miniaturized MEMS mirror with the size of 4mm×3mm (or 6mm×7mm) produces an optically sectioned line profile of a sample. Hence, if we scan the beam vertically and horizontally by this two-dimensional type of MEMS scanner, the optical sections of the sample object are formed, and the scanned result can be caught by a CCD camera and stored to be analyzed by a PC. The feature of this MEMS scanner is in that the mirror is magnetically driven at the resonant frequency. Therefore, due to resonance effect, even this small mirror brings a large scanning angle, high-speed scanning, low noise and low power consumption. The miniaturized light-weight design is also applied to realize the compact measurement system. The principle for measurement known as "triangulation" is very simple, but high accuracy is expected thanks to the recent development of sub-pixel technique. At this point of time, we are fabricating a proto-type equipment for the experimental use and, in near future, we will try to attain a compact three-dimensional measurement system using this scanner and a small bright LED light source.

Citation Download Citation

Toru Yoshizawa, Toshitaka Wakayama, and Hiroshi Takano "Applications of a MEMS scanner to profile measurement", Proc. SPIE 6762, Two- and Three-Dimensional Methods for Inspection and Metrology V, 67620B (10 October 2007); https://doi.org/10.1117/12.733048

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available