Fuzzy selective voting classifier with defect extraction based on comparison within an image

Toshifumi Honda; Ryo Nakagaki; Obara Kenji; Yuji Takagi

doi:10.1117/12.750528

15 November 2007 Fuzzy selective voting classifier with defect extraction based on comparison within an image

Toshifumi Honda, Ryo Nakagaki, Obara Kenji, Yuji Takagi

Proceedings Volume 6788, MIPPR 2007: Pattern Recognition and Computer Vision; 67881Z (2007) https://doi.org/10.1117/12.750528
Event: International Symposium on Multispectral Image Processing and Pattern Recognition, 2007, Wuhan, China

Abstract

Semiconductor visual inspection is necessary for production yield control. Defect classification is a key procedure in determing defect sources. Auttomization of this procedure is required in order to achieve efficient and high-yield production. In the present paper, an automatic defect classification (ADC) algorithm for a semiconductor inspection is proposed. The ADC algorithm consists of the following three parts; 1) A defect extraction algorithm to achieve high-sensitivity defect extraction even in regions in which the brightness is unstable due to optical interference at a thin layer. 2) An appearance feature calculation from a color image inside the defect region extracted from 1). 3) A unique training type classifier called the fuzzy selective voting classifier (FSVC), which calculates the weight for each appearance feature in order to achieve accurate classification even when the discriminancy of each feature is different. The performance of the developed ADC algorithm has been evaluated using defect acquired from an actual production line. The accuracy of the classification was 85.9% and the false rejection rate was 93%.

Citation Download Citation

Toshifumi Honda, Ryo Nakagaki, Obara Kenji, and Yuji Takagi "Fuzzy selective voting classifier with defect extraction based on comparison within an image", Proc. SPIE 6788, MIPPR 2007: Pattern Recognition and Computer Vision, 67881Z (15 November 2007); https://doi.org/10.1117/12.750528

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
8 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Inspection

Particles

Algorithm development

Semiconducting wafers

Feature extraction

Detection and tracking algorithms

Fuzzy logic

Show All Keywords

Keywords/Phrases

Search In:

Publication Years