Leakage studies on SOI slot waveguide structures

Paul Müllner; Norman Finger; Rainer Hainberger

doi:10.1117/12.763216

26 February 2008 Leakage studies on SOI slot waveguide structures

Paul Müllner, Norman Finger, Rainer Hainberger

Proceedings Volume 6898, Silicon Photonics III; 68980U (2008) https://doi.org/10.1117/12.763216
Event: Integrated Optoelectronic Devices 2008, 2008, San Jose, California, United States

Abstract

In this study, we theoretically investigate the leakage behavior of SOI slot waveguides at a wavelength of 1.55 μm. First, the dependence of the substrate leakage of vertical and horizontal wire-type slot waveguides on their geometry is shortly summarized. The main part is devoted to the lateral leakage in perfectly symmetric and asymmetric rib-type slot waveguides, which is caused by coupling between the TM-like slot mode and the TE slab modes outside the rib. The influence of the geometry parameters on the leakage behavior and the impact of structural deviations caused by the fabrication process are studied in depth. A semi-analytical criterion for the design of leakproof rib-type slot waveguides is derived and compared with full-vectorial numerical methods employing a commercial FEM solver and a recently developed variational mode-matching 2D eigenmode solver.

Citation Download Citation

Paul Müllner, Norman Finger, and Rainer Hainberger "Leakage studies on SOI slot waveguide structures", Proc. SPIE 6898, Silicon Photonics III, 68980U (26 February 2008); https://doi.org/10.1117/12.763216

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