Device-oriented directed self-assembly of Lamellar microdomains from a block copolymer containing hybrid

Ho-Cheol Kim; Joy Cheng; Oun-Ho Park; Sang-Min Park; Charles Rettner

doi:10.1117/12.772723

20 March 2008 Device-oriented directed self-assembly of Lamellar microdomains from a block copolymer containing hybrid

Ho-Cheol Kim, Joy Cheng, Oun-Ho Park, Sang-Min Park, Charles Rettner

Proceedings Volume 6921, Emerging Lithographic Technologies XII; 69212B (2008) https://doi.org/10.1117/12.772723
Event: SPIE Advanced Lithography, 2008, San Jose, California, United States

Abstract

Directed self-assembly (DSA) of a block copolymer containing hybrid material using topographic guiding patterns is presented in this paper. Lamellar microdomains of the hybrid material, which is a mixture of poly(styrene-b-ethylene oxide) (PS-b-PEO) and organosilicate (OS) precursor, have orientational correlation length about five times longer than typical organic block copolymers such as poly(styrene-b-methyl methacrylate) (PS-b-PMMA). The longer correlation length (i.e. bigger grain size) makes it possible to align the lamellar microdomain into geometries similar to device layouts. We report one-dimensional assembly of lamellar microdomains on substrates, which gives crossbar and multifinger nanostructures.

Citation Download Citation

Ho-Cheol Kim, Joy Cheng, Oun-Ho Park, Sang-Min Park, and Charles Rettner "Device-oriented directed self-assembly of Lamellar microdomains from a block copolymer containing hybrid", Proc. SPIE 6921, Emerging Lithographic Technologies XII, 69212B (20 March 2008); https://doi.org/10.1117/12.772723

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