Holographic fabrication of hierarchical nanostructures using microprism array toward optofluidic integration

Seung-Kon Lee; Hyo Sung Park; Sung Gyu Park; Jun Hyuk Moon; Seung-Man Yang

doi:10.1117/12.784963

21 April 2008 Holographic fabrication of hierarchical nanostructures using microprism array toward optofluidic integration

Seung-Kon Lee, Hyo Sung Park, Sung Gyu Park, Jun Hyuk Moon, Seung-Man Yang

Author Affiliations +

Proceedings Volume 6989, Photonic Crystal Materials and Devices VIII; 69891U (2008) https://doi.org/10.1117/12.784963
Event: SPIE Photonics Europe, 2008, Strasbourg, France

Abstract

Holographic lithography provides a highly compatible and facile way to fabricate multi-dimensional periodic nanostructures. Periodic nanostructures have useful applications not only as biological substrates or catalytic supports but also as nanophotonic devices with various photonic properties such as photonic band-gap (PBG), localized surface plasmon resonance (LSPR) or surface enhanced Raman scattering (SERS). In combination with single refracting prism holographic lithography and conventional photolithography, we could achieve the micrometer-scale patterns of periodic nanostructures which can be integrated in microfluidic chip. With the help of conventional MEMS technologies, Arrays of pyramid shape and top-cut pyramid shape microprism can be prepared. Single laser exposure step through the microprism arrays (MPAs) can be generate multiscale patterns of 2D and 3D nanostructures. As prepared nanostructures combined with microfluidic chip is a highly efficient optofluidic platform which is applicable to the chemical and biosensors.

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Seung-Kon Lee, Hyo Sung Park, Sung Gyu Park, Jun Hyuk Moon, and Seung-Man Yang "Holographic fabrication of hierarchical nanostructures using microprism array toward optofluidic integration", Proc. SPIE 6989, Photonic Crystal Materials and Devices VIII, 69891U (21 April 2008); https://doi.org/10.1117/12.784963

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KEYWORDS

Prisms

Nanostructures

Microfluidics

Lithography

Nanolithography

Silicon

Holography

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