Polysilicon thermal micro-actuators for heat scavenging and power conversion

Margarita Tecpoyotl-Torres; Jorge Varona; Anas A. Hamoui; Jesús Escobedo-Alatorre; Javier Sanchez-Mondragón

doi:10.1117/12.795768

9 September 2008 Polysilicon thermal micro-actuators for heat scavenging and power conversion

Margarita Tecpoyotl-Torres, Jorge Varona, Anas A. Hamoui, Jesús Escobedo-Alatorre, Javier Sanchez-Mondragón

Proceedings Volume 7043, High and Low Concentration for Solar Electric Applications III; 70430K (2008) https://doi.org/10.1117/12.795768
Event: Solar Energy + Applications, 2008, San Diego, California, United States

Abstract

This paper describes the design and experimental characterization of two optimized thermal actuators devised to operate by means of scavenging heat from the environment. Different from the traditional MEMS thermal actuator that relies on electric current to generate heat by Joule effect, the devices herein presented have been optimized to absorb external heat and convert it into mechanical displacement and force. The behavior of vertical and horizontal microactuators fabricated in a standard surface micro-machining process (PolyMUMPs) demonstrates the viability of exploiting heat from the surrounding medium to realize batteryless microsystems. Analytical and finite element models are provided in support of the design. Results show that fairly large and useful displacements can be achieved at commonly available operating temperatures.

Citation Download Citation

Margarita Tecpoyotl-Torres, Jorge Varona, Anas A. Hamoui, Jesús Escobedo-Alatorre, and Javier Sanchez-Mondragón "Polysilicon thermal micro-actuators for heat scavenging and power conversion", Proc. SPIE 7043, High and Low Concentration for Solar Electric Applications III, 70430K (9 September 2008); https://doi.org/10.1117/12.795768

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