Fast three-dimensional shape recovery in TFT-LCD manufacturing

Wook-Jin Choi; Tae-Sun Choi

doi:10.1117/12.798232

15 September 2008 Fast three-dimensional shape recovery in TFT-LCD manufacturing

Wook-Jin Choi, Tae-Sun Choi

Proceedings Volume 7073, Applications of Digital Image Processing XXXI; 70731U (2008) https://doi.org/10.1117/12.798232
Event: Optical Engineering + Applications, 2008, San Diego, California, United States

Abstract

In this paper, we propose shape recovery method for measuring protrusions on LCD Color filter in TFT-LCD manufacturing process. We use 3-D Focus Measure operator to find focused points. Then we find the lens step that maximizes the sum of the Focus Measure. In order to reduce the computational complexity, we apply the successive focus measure update algorithm. The 3-D shape of the object can be easily estimated from the best-focused points. Experiments are conducted on both synthetic and real images to evaluate performance of the proposed algorithms. The experimental results show that our new method is faster than previous method.

Citation Download Citation

Wook-Jin Choi and Tae-Sun Choi "Fast three-dimensional shape recovery in TFT-LCD manufacturing", Proc. SPIE 7073, Applications of Digital Image Processing XXXI, 70731U (15 September 2008); https://doi.org/10.1117/12.798232

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