Forces in rotary motion systems

Markus K Tilsch; Gregory K. Elliott

doi:10.1117/12.797479

25 September 2008 Forces in rotary motion systems

Markus K Tilsch, Gregory K. Elliott

Proceedings Volume 7101, Advances in Optical Thin Films III; 71010E (2008) https://doi.org/10.1117/12.797479
Event: Optical Systems Design, 2008, Glasgow, Scotland, United Kingdom

Abstract

In many coating chambers substrates are moved by simple or planetary rotary motion systems. Isaac Newton already taught that an object in uniform motion tends to stay in uniform motion unless acted upon by a net external force. To move a substrate on a rotary trajectory, centripetal and gravitational forces must act upon the substrate. The substrate must be somehow confined. Confinement options range from firm attachment to a fixture to loose placement in a pocket. Depending on the rotary motion pattern, a loosely held substrate may slide once against a confinement boundary and then stay, or may constantly slide around. 'Rattling around' may be undesirable as it could lead to edge destruction, debris formation, precession of the substrate, and other adverse effects. Firm attachment is advantageous in most cases, but often adds process complexity. We examine the forces present on substrates in typical rotary motion systems and discuss the implications of different confinement methods.

Citation Download Citation

Markus K Tilsch and Gregory K. Elliott "Forces in rotary motion systems", Proc. SPIE 7101, Advances in Optical Thin Films III, 71010E (25 September 2008); https://doi.org/10.1117/12.797479

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available