Metrology in the soft x-ray range: from EUV to the water window

Christian Laubis; Frank Scholze; Gerhard Ulm

doi:10.1117/12.797721

25 September 2008 Metrology in the soft x-ray range: from EUV to the water window

Christian Laubis, Frank Scholze, Gerhard Ulm

Proceedings Volume 7101, Advances in Optical Thin Films III; 71011U (2008) https://doi.org/10.1117/12.797721
Event: Optical Systems Design, 2008, Glasgow, Scotland, United Kingdom

Abstract

Metrology in the soft X-ray range has various applications ranging from instrumentation for solar astronomy to plasma experiments and EUV Lithography. The Physikalisch-Technische Bundesanstalt (PTB) with its laboratory at the electron storage ring BESSY II is a centre of soft X-ray radiometry and supports national and European research and development by carrying out high-accuracy at-wavelength measurements. The absolute detection efficiency of entire detection systems, diodes or cameras can be traced to SI units with a typical relative uncertainty of 0.5 % to 1 % using a cryogenic electrical substitution radiometer. For reflectometry on multilayer mirrors (MLMs) PTB operates a large reflectometer accommodating samples of up to 550 mm in diameter and 50 kg in weight, allowing sample alignment in 6 degrees of freedom. The relative measurement uncertainty for the spectral reflectance is typically in the range of 0.15 % and the long-term reproducibility in the range of 0.10 %. To investigate roughness, scatterometry is employed where scattered light around the specular beam is mapped using a calibrated CCD.

Citation Download Citation

Christian Laubis, Frank Scholze, and Gerhard Ulm "Metrology in the soft x-ray range: from EUV to the water window", Proc. SPIE 7101, Advances in Optical Thin Films III, 71011U (25 September 2008); https://doi.org/10.1117/12.797721

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