A far infrared/terahertz micromechanical sensor based on surface plasmons resonance

J. Hastanin; Y. Renotte; K. Fleury-Frenette; J. M. Defise; S. Habraken

doi:10.1117/12.799854

2 October 2008 A far infrared/terahertz micromechanical sensor based on surface plasmons resonance

J. Hastanin, Y. Renotte, K. Fleury-Frenette, J. M. Defise, S. Habraken

Proceedings Volume 7113, Electro-Optical and Infrared Systems: Technology and Applications V; 71131C (2008) https://doi.org/10.1117/12.799854
Event: SPIE Security + Defence, 2008, Cardiff, Wales, United Kingdom

Abstract

This paper describes a new concept related to the bolometric micromechanical sensors for detecting far IR and THz radiation. We believe that this concept permits a low cost and ease of fabrication of large bi-dimensional array of sensors with an enhanced signal-to-noise ratio. The micromechanical sensor comprises a thermo-sensitive bi-material (multi-material) micro-cantilever beam with a selective absorber dedicated to far IR and THz radiation energy, and optical readout system based on surface plasmon resonance for detecting the bending of the micro-cantilever element. To increase the radiation detector sensitivity, the SPR phenomenon is used for cantilever deflection monitoring.

Citation Download Citation

J. Hastanin, Y. Renotte, K. Fleury-Frenette, J. M. Defise, and S. Habraken "A far infrared/terahertz micromechanical sensor based on surface plasmons resonance", Proc. SPIE 7113, Electro-Optical and Infrared Systems: Technology and Applications V, 71131C (2 October 2008); https://doi.org/10.1117/12.799854

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available