Digital laser microferoscope for NDT

Michael Schuth; Frank Vössing; Lianxiang Yang

doi:10.1117/12.819662

31 December 2008 Digital laser microferoscope for NDT

Michael Schuth, Frank Vössing, Lianxiang Yang

Proceedings Volume 7130, Fourth International Symposium on Precision Mechanical Measurements; 71302V (2008) https://doi.org/10.1117/12.819662
Event: Fourth International Symposium on Precision Mechanical Measurements, 2008, Anhui, China

Abstract

In industry non-contacting measurement systems are becoming more and more a necessity. Among non-contacting techniques, optical method enjoys the virtues of being whole-field and non-contaminating and is getting more and more acceptance by industries for characterization of microsystems. In this paper, a universal digital microscopic laser speckle interferometer, which is called "Microferoscope" in the paper, is presented. The system is designed for measuring microstructures and Micro-Electro-Mechanical Systems (MEMS) with rough surface. The method is based on laser speckle interferometry incorporating a long distance microscope (LDM), a CCD-Camera and a high precision phase shifting technique. In this paper, the theory and methodology of the universal digital laser Microferoscope are described. A special software program "OPTIS" is developed for automatic data acquisition and evaluation. The usefulness of the Microferoscope is demonstrated by examples of shape and displacement measurement for different samples.

Citation Download Citation

Michael Schuth, Frank Vössing, and Lianxiang Yang "Digital laser microferoscope for NDT", Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 71302V (31 December 2008); https://doi.org/10.1117/12.819662

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