Paper
23 February 1987 Monolithically Integrable High Speed Photodetectors
D J Jackson, D L Persechini
Author Affiliations +
Proceedings Volume 0716, High Frequency Optical Communications; (1987) https://doi.org/10.1117/12.937457
Event: Cambridge Symposium-Fiber/LASE '86, 1986, Cambridge, MA, United States
Abstract
Monolithically integrable lateral PIN detectors have been developed. The device fabrication procedure has been optimized to be compatible with standard integrated circuit fabrication procedures.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
D J Jackson and D L Persechini "Monolithically Integrable High Speed Photodetectors", Proc. SPIE 0716, High Frequency Optical Communications, (23 February 1987); https://doi.org/10.1117/12.937457
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CITATIONS
Cited by 3 scholarly publications.
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KEYWORDS
Sensors

Metals

Gallium arsenide

Gold

Interfaces

Aluminum

Electrodes

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