Micromachined Resonant Structures

B Culshaw; D Uttam; J Nixon; K Thornton; A Wright

doi:10.1117/12.937502

28 April 1987 Micromachined Resonant Structures

B Culshaw, D Uttam, J Nixon, K Thornton, A Wright

Proceedings Volume 0718, Fiber Optic and Laser Sensors IV; (1987) https://doi.org/10.1117/12.937502
Event: Cambridge Symposium-Fiber/LASE '86, 1986, Cambridge, MA, United States

Abstract

Micromachined structures, usually formed by anistropic etchings in silicon, can be fabricated with high precision at low cost and may form the basis of a variety of low power consumption resonant frequency mircotransducers. Such structures are compatible with direct optical excitation of their mechanical vibra, on and as such form an attractive family of fibre optic sensors. This paper reviews the basic features of these micromachined structures and presents an assessment of their performance potential as fibre optic sensors.

Citation Download Citation

B Culshaw, D Uttam, J Nixon, K Thornton, and A Wright "Micromachined Resonant Structures", Proc. SPIE 0718, Fiber Optic and Laser Sensors IV, (28 April 1987); https://doi.org/10.1117/12.937502

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available