Post-develop blob defect reduction

Masahiko Harumoto; Sei Negoro; Akihiro Hisai; Michio Tanaka; Glen Mori; Mark Slezak

doi:10.1117/12.813605

1 April 2009 Post-develop blob defect reduction

Masahiko Harumoto, Sei Negoro, Akihiro Hisai, Michio Tanaka, Glen Mori, Mark Slezak

Proceedings Volume 7273, Advances in Resist Materials and Processing Technology XXVI; 72730P (2009) https://doi.org/10.1117/12.813605
Event: SPIE Advanced Lithography, 2009, San Jose, California, United States

Abstract

This study reports on blob defect reduction and process impacts by Acid Rinse System. Blob defects that appear after develop are a common problem with i-line, KrF, ArF and ArF-immersion resists. Last year we reported Blob defects were influenced by the develop process and were able to be decreased by improving process. Furthermore we identified blob defects were caused from alkaline developer and could be reduced by neutralizing Acid Rinse. In this work, we designed a novel develop process and system that reduced blob defects. We evaluated this system on the non-topcoat immersion resist. The blob defects on immersion resist were also eliminated by this system but affected by each resist surface condition. We also evaluated the impacts from Acid rinse for some kinds of patterns and resists, because we needed to indentify whether there were negatively process impacts. We reports that Acid Rinse System significantly reduced blob defect counts, and whether influenced other process impacts. Finally we report the mechanism of the blob defects reduction.

Citation Download Citation

Masahiko Harumoto, Sei Negoro, Akihiro Hisai, Michio Tanaka, Glen Mori, and Mark Slezak "Post-develop blob defect reduction", Proc. SPIE 7273, Advances in Resist Materials and Processing Technology XXVI, 72730P (1 April 2009); https://doi.org/10.1117/12.813605

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available