Contact formation with extremely low proximity effect by double patterning technology

C. W. Yeh; S. S. Yu; H. J. Lee; C. H. Huang; Elvis Yang; T. H. Yang; K. C. Chen; Chih-Yuan Lu

doi:10.1117/12.812466

1 April 2009 Contact formation with extremely low proximity effect by double patterning technology

C. W. Yeh, S. S. Yu, H. J. Lee, C. H. Huang, Elvis Yang, T. H. Yang, K. C. Chen, Chih-Yuan Lu

Proceedings Volume 7273, Advances in Resist Materials and Processing Technology XXVI; 72731E (2009) https://doi.org/10.1117/12.812466
Event: SPIE Advanced Lithography, 2009, San Jose, California, United States

Abstract

Contact hole within a NOR FLASH memory array is one of the most challenging features to print in the semiconductor manufacturing. It has been the key limiter of NOR FLASH memory scaling due to the difficulties involved in patterning the one-dimensional contact arrays and extremely stringent contact to gate overlay constraints. In this study, DPT (Double Patterning Technology) by ArF dry process was introduced for patterning NOR FLASH memory contact arrays. This approach has demonstrated a contact patterning with extremely low optical proximity effect for 50nm half-pitch with satisfied lithography process latitude and especially the circular contact shape can be maintained without compromise of NOR FLASH cell area. The novel hard mask scheme was the key enabler for this contact double patterning and this approach can be easily extended to ArF immersion lithography as a promising option for contact formation in leading-edge memory products.

Citation Download Citation

C. W. Yeh, S. S. Yu, H. J. Lee, C. H. Huang, Elvis Yang, T. H. Yang, K. C. Chen, and Chih-Yuan Lu "Contact formation with extremely low proximity effect by double patterning technology", Proc. SPIE 7273, Advances in Resist Materials and Processing Technology XXVI, 72731E (1 April 2009); https://doi.org/10.1117/12.812466

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available