Fabricating fluorinated polyimide optical waveguide by CO2 laser direct-writing

Xi Jin; Daqing Zhu; Xiaoyan Zeng

doi:10.1117/12.823213

18 February 2009 Fabricating fluorinated polyimide optical waveguide by CO₂ laser direct-writing

Xi Jin, Daqing Zhu, Xiaoyan Zeng

Proceedings Volume 7276, Photonics and Optoelectronics Meetings (POEM) 2008: Laser Technology and Applications; 72760O (2009) https://doi.org/10.1117/12.823213
Event: Photonics and Optoelectronics Meetings, 2008, Wuhan, China

Abstract

Fluorinated polyimide waveguides were fabricated by CO₂ laser direct-writing. The poly(amic acid) micro-region exposed by CO₂ laser beam was measured with FT-IR micro-spectroscopy. The FT-IR spectra indicated that the laser imidized polyimide was semicrystalline, and the imidization degree of scanned micro-region increased with the rising of output laser power. The increased aspect ratio of waveguide and smoothness of surface can be achieved by increasing the pre-cured temperature (below 120 °C) and writing rate, and optimizing laser power and the distance between the lens and the annular aperture. The guided light was clearly confined to the core of the fabricated waveguide, which means this technique can be used for fluorinated polyimide waveguide fabrication.

Citation Download Citation

Xi Jin, Daqing Zhu, and Xiaoyan Zeng "Fabricating fluorinated polyimide optical waveguide by CO₂ laser direct-writing", Proc. SPIE 7276, Photonics and Optoelectronics Meetings (POEM) 2008: Laser Technology and Applications, 72760O (18 February 2009); https://doi.org/10.1117/12.823213

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