Nanotube MEMS: modeling extreme nanoscale devices

Slava V. Rotkin

doi:10.1117/12.818828

11 May 2009 Nanotube MEMS: modeling extreme nanoscale devices

Slava V. Rotkin

Proceedings Volume 7318, Micro- and Nanotechnology Sensors, Systems, and Applications; 731806 (2009) https://doi.org/10.1117/12.818828
Event: SPIE Defense, Security, and Sensing, 2009, Orlando, Florida, United States

Abstract

The physics of operation of nanotube NEMS devices is reviewed. Special attention is paid to non-classical effects, rarely described in MEMS analysis, such as van derWaals/Casimir interactions, quantum effects in electrostatics, atomistic parameterization of elasticity. As an example of a breakdown of a classical MEMS theory, the NEMS scaling limitation is derived in a lump model taking into account van der Waals/Casimir attraction.

Citation Download Citation

Slava V. Rotkin "Nanotube MEMS: modeling extreme nanoscale devices", Proc. SPIE 7318, Micro- and Nanotechnology Sensors, Systems, and Applications, 731806 (11 May 2009); https://doi.org/10.1117/12.818828

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