Fabrication of vertically standing metal nanowire arrays on silicon substrates using anodized aluminum oxide (AAO) and polycarbonate (PC) templates

Seongjin Jang; Souran Manoochehri; Eui-Hyeok Yang

doi:10.1117/12.820904

11 May 2009 Fabrication of vertically standing metal nanowire arrays on silicon substrates using anodized aluminum oxide (AAO) and polycarbonate (PC) templates

Seongjin Jang, Souran Manoochehri, Eui-Hyeok Yang

Author Affiliations +

Proceedings Volume 7318, Micro- and Nanotechnology Sensors, Systems, and Applications; 73181K (2009) https://doi.org/10.1117/12.820904
Event: SPIE Defense, Security, and Sensing, 2009, Orlando, Florida, United States

Abstract

We present a new fabrication method to grow vertically aligned nanowire arrays on a silicon substrate using commercially available anodized aluminum oxide (AAO) and polycarbonate (PC) templates. This technique eliminates the preparation procedure of coating one side of the template with a conductive layer, which is required in most template assisted nanowire growth methods. In this study, vertically aligned nanowires with a high aspect ratio of over 10 were fabricated on silicon substrate by electrodeposition, potentially enabling mass production.

Citation Download Citation

Seongjin Jang, Souran Manoochehri, and Eui-Hyeok Yang "Fabrication of vertically standing metal nanowire arrays on silicon substrates using anodized aluminum oxide (AAO) and polycarbonate (PC) templates", Proc. SPIE 7318, Micro- and Nanotechnology Sensors, Systems, and Applications, 73181K (11 May 2009); https://doi.org/10.1117/12.820904

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