Influence of air viscous damping on beam-shaped micro-oscillator

Xin Kang; Zhanwen Xi; Dingguo Zhang

doi:10.1117/12.839041

24 August 2009 Influence of air viscous damping on beam-shaped micro-oscillator

Xin Kang, Zhanwen Xi, Dingguo Zhang

Proceedings Volume 7375, ICEM 2008: International Conference on Experimental Mechanics 2008; 73750Y (2009) https://doi.org/10.1117/12.839041
Event: International Conference on Experimental Mechanics 2008 and Seventh Asian Conference on Experimental Mechanics, 2008, Nanjing, China

Abstract

Micro beams are frequently used as executive components in MEMS such as pressure and acceleration sensors, micro switches, and micro resonators. In this paper, the influence of air viscous damping on the dynamic characteristics of a micro beam that oscillates in the air is evaluated analytically. A closed-form solution that can be used to predict the dynamic response of a micro beam is obtained based on a beam model used for evaluating the air viscous damping. The resonant frequencies versus the geometry parameters of a micro beam undergoing the air viscous damping are analyzed. The analysis results show that the influence of the air viscous damping on the resonant frequencies of a micro beam is notable and hence it should be take into account in the design process of MEMS. Moreover, as we know, there are various excitation methods for a micro beam in dynamics such as the electrostatic and PZT methods. The analytical results in our work also show that the influence of air viscosity on the dynamic characteristics of a micro beam will be diverse under different excitation methods.

Citation Download Citation

Xin Kang, Zhanwen Xi, and Dingguo Zhang "Influence of air viscous damping on beam-shaped micro-oscillator", Proc. SPIE 7375, ICEM 2008: International Conference on Experimental Mechanics 2008, 73750Y (24 August 2009); https://doi.org/10.1117/12.839041

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