Nondestructive evaluation of MEMS components by optical methods

C. J. Tay; C. Quan; S. H. Wang

doi:10.1117/12.839234

24 August 2009 Nondestructive evaluation of MEMS components by optical methods

C. J. Tay, C. Quan, S. H. Wang

Proceedings Volume 7375, ICEM 2008: International Conference on Experimental Mechanics 2008; 73752X (2009) https://doi.org/10.1117/12.839234
Event: International Conference on Experimental Mechanics 2008 and Seventh Asian Conference on Experimental Mechanics, 2008, Nanjing, China

Abstract

In this work, a white light interferometry technique has been developed for non-destructive testing of micro-components. Essentially, the method utilizes a white light source which illuminates a test object using a modified Michelson interferometer configuration. The test object is mounted on a piezoelectric transducer (PZT) moving stage with a resolution of 1 nm. Images of the test objects are recorded using a CCD camera and stored in a PC for subsequent processing. Tests are conducted on an etched micro-beam which contains un-etched residual remains and optical multifibre ends. The results obtained show good agreement with those obtained from existing commercial profilometers and atomic force microscope.

Citation Download Citation

C. J. Tay, C. Quan, and S. H. Wang "Nondestructive evaluation of MEMS components by optical methods", Proc. SPIE 7375, ICEM 2008: International Conference on Experimental Mechanics 2008, 73752X (24 August 2009); https://doi.org/10.1117/12.839234

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