Micro/nano scale mechanical tests based on the probe platform

Xide Li; Lijuan Sun; Dongchuan Sun; Dujuan Zeng; Bo Jiang

doi:10.1117/12.839235

24 August 2009 Micro/nano scale mechanical tests based on the probe platform

Xide Li, Lijuan Sun, Dongchuan Sun, Dujuan Zeng, Bo Jiang

Proceedings Volume 7375, ICEM 2008: International Conference on Experimental Mechanics 2008; 73752Y (2009) https://doi.org/10.1117/12.839235
Event: International Conference on Experimental Mechanics 2008 and Seventh Asian Conference on Experimental Mechanics, 2008, Nanjing, China

Abstract

Instrumentation for testing of mechanical properties on the micro and nano scales has developed enormously in recent years. This has enabled the mechanical behavior of surfaces, thin films, and micro/nano components to be studied with unprecedentedly small scale and high accuracy. In this paper, several testing systems and techniques for studying micromechanical properties are reviewed with particular emphasis on the probe based platform and its applications. Topics include the principles and performances of the integrated systems between the probe and the micromanipulator, the piezo-stage, the optical and high resolution scanning microscopes, the single and dual probe testing systems and the related method of micro force test. Researches on the capillary interaction between the probe tip and air-water surface, the motion of graphite microflakes, and accurate measurement of the mechanical parameter of nanowire are provided.

Citation Download Citation

Xide Li, Lijuan Sun, Dongchuan Sun, Dujuan Zeng, and Bo Jiang "Micro/nano scale mechanical tests based on the probe platform", Proc. SPIE 7375, ICEM 2008: International Conference on Experimental Mechanics 2008, 73752Y (24 August 2009); https://doi.org/10.1117/12.839235

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