Studies on (Sr,Ba)TiO3 epitaxial grown thin films prepared by sol-gel processing

Xing-hua Fu; Wen-hong Tao; Li-qiang Xin; Feng-jin Sun

doi:10.1117/12.839347

25 August 2009 Studies on (Sr,Ba)TiO₃ epitaxial grown thin films prepared by sol-gel processing

Xing-hua Fu, Wen-hong Tao, Li-qiang Xin, Feng-jin Sun

Proceedings Volume 7375, ICEM 2008: International Conference on Experimental Mechanics 2008; 73755K (2009) https://doi.org/10.1117/12.839347
Event: International Conference on Experimental Mechanics 2008 and Seventh Asian Conference on Experimental Mechanics, 2008, Nanjing, China

Abstract

The applications of (Sr,Ba)TiO₃ thin films in DRAM(Dynamic Random Access Memory), phase shifters and pyroelectric uncooled infrared detector have been one of the most important fields in the materials science. (Sr,Ba)TiO₃ epitaxially grown thin films with good performance were prepared by the Sol-Gel process using barium acetate, strontium acetate and titanium-tetrabutoxide as the precursor materials. SrTiO₃ substrate have the same perovskite structure and a similar lattice constant with the BST thin films, and have excellent chemical and thermal stability. The orientations of BST thin film grown on Nb:SrTiO₃(100) and SrTiO₃(100) substrates were (100) and (200) respectively. The dielectric constant and dielectric loss of the Sr.5Ba0.4Mg0.1TiO₃ thin film prepared on Nb:SrTiO₃ (100) were 100 and 0.0191 respectively at the frequency of 1M.

Citation Download Citation

Xing-hua Fu, Wen-hong Tao, Li-qiang Xin, and Feng-jin Sun "Studies on (Sr,Ba)TiO₃ epitaxial grown thin films prepared by sol-gel processing", Proc. SPIE 7375, ICEM 2008: International Conference on Experimental Mechanics 2008, 73755K (25 August 2009); https://doi.org/10.1117/12.839347

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