Finite element analysis of the deformable mirror

Fu Zhao; Ping Wang; Yanjue Gong; Chunling Meng; Yude Liu

doi:10.1117/12.834921

24 August 2009 Finite element analysis of the deformable mirror

Fu Zhao, Ping Wang, Yanjue Gong, Chunling Meng, Yude Liu

Proceedings Volume 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors; 73810S (2009) https://doi.org/10.1117/12.834921
Event: International Symposium on Photoelectronic Detection and Imaging 2009, 2009, Beijing, China

Abstract

As a critical optoelectronics component of adaptive optics, the deformable mirrors (DM) is concerned by more and more researchers and has been developed even faster in recent years. In order to obtain the high mirror accuracy and image quality, it is very significant for the deformable mirror to design the best support structure with high dynamic stiffness. This paper discusses the DM support structure's mechanical principle and carries out optimal design based on the finite element analysis. Three kinds of DM support structures with different sections are selected to analyze their resonate frequencies. After determining the support structure with larger mode frequency among them, an optimal design solution has been introduced to determine a group of reasonable structure parameters which improve the resonate frequency of the supporting structure. Finally, the random response, harmonic response analysis and fatigue lifetime analysis of the support structure are implemented to confirm the effect of the optimal design, and provide basis for the design of subassembly structure of the deformable mirrors.

Citation Download Citation

Fu Zhao, Ping Wang, Yanjue Gong, Chunling Meng, and Yude Liu "Finite element analysis of the deformable mirror", Proc. SPIE 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors, 73810S (24 August 2009); https://doi.org/10.1117/12.834921

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