Numerical investigations of prospects, challenges, and limitations of non-imaging optical metrology of structured surfaces

B. Bodermann; M. Wurm

doi:10.1117/12.830663

17 June 2009 Numerical investigations of prospects, challenges, and limitations of non-imaging optical metrology of structured surfaces

B. Bodermann, M. Wurm

Author Affiliations +

Proceedings Volume 7390, Modeling Aspects in Optical Metrology II; 73900R (2009) https://doi.org/10.1117/12.830663
Event: SPIE Europe Optical Metrology, 2009, Munich, Germany

Abstract

We investigate some prospects of scatterometric methods for quantitative dimensional metrology of periodic micro- and nanostructures like e. g. parameter sensitivity. Additionally we discuss some limitations with respect to numerical or metrological constrains of different scatterometric methods.

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B. Bodermann and M. Wurm "Numerical investigations of prospects, challenges, and limitations of non-imaging optical metrology of structured surfaces", Proc. SPIE 7390, Modeling Aspects in Optical Metrology II, 73900R (17 June 2009); https://doi.org/10.1117/12.830663

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