Far field of binary phase gratings with errors in the height of the strips

José María Rico-García; Luis Miguel Sanchez-Brea

doi:10.1117/12.827580

17 June 2009 Far field of binary phase gratings with errors in the height of the strips

José María Rico-García, Luis Miguel Sanchez-Brea

Proceedings Volume 7390, Modeling Aspects in Optical Metrology II; 739019 (2009) https://doi.org/10.1117/12.827580
Event: SPIE Europe Optical Metrology, 2009, Munich, Germany

Abstract

Diffraction gratings are not always ideal but, due to the fabrication process, several errors can be produced. In this work we show that when the strips of a binary phase diffraction grating present certain randomness in their height, the intensity of the diffraction orders varies with respect to that obtained with a perfect grating. To show this, we perform an analysis of the mutual coherence function and then, the intensity distribution at the far field is obtained. In addition to the far field diffraction orders, a "halo" that surrounds the diffraction order is found, which is due to the randomness of the strips height.

Citation Download Citation

José María Rico-García and Luis Miguel Sanchez-Brea "Far field of binary phase gratings with errors in the height of the strips", Proc. SPIE 7390, Modeling Aspects in Optical Metrology II, 739019 (17 June 2009); https://doi.org/10.1117/12.827580

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