Synthesis of large-area graphene layers on nickel film by chemical vapor deposition: wrinkle formation

Seung Jin Chae; Fethullah Günes; Ki Kang Kim; Eun Sung Kim; Gang Hee Han; Soo Min Kim; Hyeon-Jin Shin; Seon-Mi Yoon; Jae-Young Choi; Min Ho Park; Cheol Woong Yang; Didier Pribat; Young Hee Lee

doi:10.1117/12.828039

18 August 2009 Synthesis of large-area graphene layers on nickel film by chemical vapor deposition: wrinkle formation

Seung Jin Chae, Fethullah Günes, Ki Kang Kim, Eun Sung Kim, Gang Hee Han, Soo Min Kim, Hyeon-Jin Shin, Seon-Mi Yoon, Jae-Young Choi, Min Ho Park, Cheol Woong Yang, Didier Pribat, Young Hee Lee

Author Affiliations +

Proceedings Volume 7399, Carbon Nanotubes, Graphene, and Associated Devices II; 73990W (2009) https://doi.org/10.1117/12.828039
Event: SPIE NanoScience + Engineering, 2009, San Diego, California, United States

Abstract

Highly crystalline few-graphene layers were synthesized on poly-nickel, Ni(111) and Ni-deposited substrates by optimizing the mixing ratio of C₂H₂/H₂ and C₂H₄/H₂ and growth time. The hydrogen effect was investigated to minimize defects and maintain uniformity of the synthesized few-layer graphenes. Using the optimized ratio of hydrogen and acetylene mixture, few graphene layers with large sizes of up to 4 inches in diameter were also synthesized on Ni evaporated Si substrate with different thicknesses and were transferred successfully onto PET film. We also found that the wrinkles, different from inherent ripples, were formed in the graphene layer independent of the location of the grain boundary of poly-Ni substrate and growth conditions. This was attributed to the formation of a step terrace followed by the terrace bunching to result in higher wrinkles due to the thermal mismatch existing between Ni substrate and graphene layers during thermal quenching. A sheet resistance of 233 Ω/sq was obtained at a transmittance of 65%.

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Seung Jin Chae, Fethullah Günes, Ki Kang Kim, Eun Sung Kim, Gang Hee Han, Soo Min Kim, Hyeon-Jin Shin, Seon-Mi Yoon, Jae-Young Choi, Min Ho Park, Cheol Woong Yang, Didier Pribat, and Young Hee Lee "Synthesis of large-area graphene layers on nickel film by chemical vapor deposition: wrinkle formation", Proc. SPIE 7399, Carbon Nanotubes, Graphene, and Associated Devices II, 73990W (18 August 2009); https://doi.org/10.1117/12.828039

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