Surface-sensitive strain analysis of Si/SiGe line structures by Raman and UV-Raman spectroscopy

Marek Roelke; Michael Hecker; Peter Hermann; David Lehninger; Yvonne Ritz; Ehrenfried Zschech; Victor Vartanian

doi:10.1117/12.830866

21 August 2009 Surface-sensitive strain analysis of Si/SiGe line structures by Raman and UV-Raman spectroscopy

Marek Roelke, Michael Hecker, Peter Hermann, David Lehninger, Yvonne Ritz, Ehrenfried Zschech, Victor Vartanian

Proceedings Volume 7405, Instrumentation, Metrology, and Standards for Nanomanufacturing III; 74050S (2009) https://doi.org/10.1117/12.830866
Event: SPIE NanoScience + Engineering, 2009, San Diego, California, United States

Abstract

Strained silicon is applied to the transistor channel of leading-edge CMOS devices, significantly increasing carrier mobility and requiring measurement techniques to characterize strain. In the investigation reported here, we apply Raman spectroscopy using excitation by both visible and UV light in conjunction with finite-element analysis to analyze the strain distribution adjacent to embedded silicon-germanium (SiGe) line structures in silicon wafers. In agreement with the modeling results, a strong strain depth gradient is obtained for the silicon lines, whereas the strain within the SiGe regions depends weakly on the depth. We show further how the stress tensor and its distribution in both SiGe and Si regions is modified when changing the geometry of the line structures. For the strained Si line region, a sensitive dependence of the stress state on the geometry is obtained.

Citation Download Citation

Marek Roelke, Michael Hecker, Peter Hermann, David Lehninger, Yvonne Ritz, Ehrenfried Zschech, and Victor Vartanian "Surface-sensitive strain analysis of Si/SiGe line structures by Raman and UV-Raman spectroscopy", Proc. SPIE 7405, Instrumentation, Metrology, and Standards for Nanomanufacturing III, 74050S (21 August 2009); https://doi.org/10.1117/12.830866

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available