Application of the Talbot effect for three-dimensional and step-height measurement using an LCD

Elizabeth Vela-Esparza; Gustavo Ramírez-Zavaleta; Marco Antonio Rosales-Medina; Ponciano Rodríguez-Montero; Eduardo Tepichín-Rodríguez

doi:10.1117/12.826396

1 September 2009 Application of the Talbot effect for three-dimensional and step-height measurement using an LCD

Elizabeth Vela-Esparza, Gustavo Ramírez-Zavaleta, Marco Antonio Rosales-Medina, Ponciano Rodríguez-Montero, Eduardo Tepichín-Rodríguez

Author Affiliations +

Proceedings Volume 7442, Optics and Photonics for Information Processing III; 74420F (2009) https://doi.org/10.1117/12.826396
Event: SPIE Optical Engineering + Applications, 2009, San Diego, California, United States

Abstract

The self-imaging phenomenon under coherent illumination or Talbot effect has been widely used in different fields including optical metrology. According to the Talbot effect, when a periodic grating is illuminated with spatially and temporary collimated coherent light, the grating is self-imaged at a certain distance, Z_T, which depends on the inverse of the wavelength λ of the incident light and the square of the period, d, of the grating. This means that they can be seen at different positions Z_T by changing either d or λ. Using the wavelength dependence of the self-images, and a fixed period, d, an application of the Talbot effect for three-dimensional and step-height measurement using a two-wavelength laser, appeared recently in the literature. We propose in this work to use an LCD to display a tunable grating. In our setup, we used a fixed wavelength and a dynamic 1-D grating to adjust the step-height measurement capabilities. We also analyze the possibility of measuring continuously varying surfaces with this technique. We include the preliminary results of our proposal.

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Elizabeth Vela-Esparza, Gustavo Ramírez-Zavaleta, Marco Antonio Rosales-Medina, Ponciano Rodríguez-Montero, and Eduardo Tepichín-Rodríguez "Application of the Talbot effect for three-dimensional and step-height measurement using an LCD", Proc. SPIE 7442, Optics and Photonics for Information Processing III, 74420F (1 September 2009); https://doi.org/10.1117/12.826396

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