Development of a high-precision slit for x-ray beamline at SPring-8

T. Takeuchi; M. Tanaka; T. Miura; Y. Senba; Y. Shimada; H. Tajiri; O. Sakata; M. Sato; T. Koganezawa; K. Uesugi; H. Ohashi; S. Goto

doi:10.1117/12.826838

8 September 2009 Development of a high-precision slit for x-ray beamline at SPring-8

T. Takeuchi, M. Tanaka, T. Miura, Y. Senba, Y. Shimada, H. Tajiri, O. Sakata, M. Sato, T. Koganezawa, K. Uesugi, H. Ohashi, S. Goto

Author Affiliations +

Proceedings Volume 7448, Advances in X-Ray/EUV Optics and Components IV; 74480Y (2009) https://doi.org/10.1117/12.826838
Event: SPIE Optical Engineering + Applications, 2009, San Diego, California, United States

Abstract

A high-precision slit for monochromatic x-rays has been developed as one of the standardized components in the undulator beamline at SPring-8. Advanced experiments such as x-ray micro-beam diffraction and x-ray scanning microscope using nano-beam require small, variable and accurate apertures. The newly developed slit has an aperture size ranging from 1 μm × 1 μm to 20 mm × 20 mm with a resolution of 0.5 μm in full step. Each blade is independently driven through bellows mounted on both sides of the vacuum chamber. A set of bellows prevents displacement of the blade by evacuation. Using this slit, we could improve the displacement from 20 μm to 1 μm. The positioning accuracy of the slit is 0.5 μm. The slits have been installed in the three beamlines at SPring-8.

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T. Takeuchi, M. Tanaka, T. Miura, Y. Senba, Y. Shimada, H. Tajiri, O. Sakata, M. Sato, T. Koganezawa, K. Uesugi, H. Ohashi, and S. Goto "Development of a high-precision slit for x-ray beamline at SPring-8", Proc. SPIE 7448, Advances in X-Ray/EUV Optics and Components IV, 74480Y (8 September 2009); https://doi.org/10.1117/12.826838

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