A miniature extrinsic fiber Fabry-Perot pressure sensor based on fiber etching

Yixian Ge; Ming Wang; Chundi Yang

doi:10.1117/12.834941

5 October 2009 A miniature extrinsic fiber Fabry-Perot pressure sensor based on fiber etching

Yixian Ge, Ming Wang, Chundi Yang

Proceedings Volume 7503, 20th International Conference on Optical Fibre Sensors; 750341 (2009) https://doi.org/10.1117/12.834941
Event: 20th International Conference on Optical Fibre Sensors, 2009, Edinburgh, United Kingdom

Abstract

This paper presents a miniature fiber optic pressure sensor based on Fabry-Perot interference fabricated on the tip of a single mode (SM) fiber. The sensor measures only 125μm in diameter. A Fabry-Perot cavity and a thin silica diaphragm are fabricated by simple techniques involving only fusion splicing, cleaving, and wet chemical etching. Interference pattern of the sensor is analyzed and issues in sensor design are discussed. The overall chemical reaction of the fiber wet etching is specifically represented. Pressure testing system is carried out. By tracing a peak point in the interference spectrum, the gap length of the sensor can be demodulated. The sensor is made entirely of fused silica, whose structure has good stability, cabinet, simple for fabrication and low cost. It may also find uses in medical applications.

Citation Download Citation

Yixian Ge, Ming Wang, and Chundi Yang "A miniature extrinsic fiber Fabry-Perot pressure sensor based on fiber etching", Proc. SPIE 7503, 20th International Conference on Optical Fibre Sensors, 750341 (5 October 2009); https://doi.org/10.1117/12.834941

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