Microstructure testing with digital holography

Qieni Lü; Baozhen Ge; Yiliang Chen; Jin Zou

doi:10.1117/12.837812

20 November 2009 Microstructure testing with digital holography

Qieni Lü, Baozhen Ge, Yiliang Chen, Jin Zou

Proceedings Volume 7511, 2009 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems; 751105 (2009) https://doi.org/10.1117/12.837812
Event: International Conference on Optical Instrumentation and Technology, 2009, Shanghai, China

Abstract

An optical system of digital holography based on 4f system for microstructure measurement is studied. Fresnel off-axis hologram generated by a magnified image of microstructure is recorded with a CCD, and the magnified reconstructed image can be obtained by the angular spectrum method. The quantitative phase information of the microstructure under test is obtained. A theoretical analysis is performed in detail and the experiment done, and the experimental results are also given. The research shows that the method presented in this paper can be applied to micro-object imaging and its quantitative measurement.

Citation Download Citation

Qieni Lü, Baozhen Ge, Yiliang Chen, and Jin Zou "Microstructure testing with digital holography", Proc. SPIE 7511, 2009 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 751105 (20 November 2009); https://doi.org/10.1117/12.837812

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