Paper
26 October 2009 High efficiency Silicon-on-Insulator grating coupler between submicron waveguides and fibers
Yu Zhu, Zhiyong Li, Weihua Han, Zhongchao Fan, Yude Yu, Jinzhong Yu
Author Affiliations +
Abstract
A high efficiency Silicon-on-Insulator (SOI) grating coupler between submicron waveguides and fibers was designed and fabricated. The experimental study showed that a maximum coupling efficiency of 38% and 3dB bandwidth of larger than 40 nm at each end of a waveguide is achievable in a fiber in- fiber out setup.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yu Zhu, Zhiyong Li, Weihua Han, Zhongchao Fan, Yude Yu, and Jinzhong Yu "High efficiency Silicon-on-Insulator grating coupler between submicron waveguides and fibers", Proc. SPIE 7516, Photonics and Optoelectronics Meetings (POEM) 2009: Optoelectronic Devices and Integration, 75160A (26 October 2009); https://doi.org/10.1117/12.843423
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CITATIONS
Cited by 3 scholarly publications.
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KEYWORDS
Waveguides

Silicon

Optical fibers

Diffraction gratings

Etching

Optical design

Scanning electron microscopy

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