Paper
14 April 2010 Meso-moiré fringe observation of nano-particle structures by electron moiré method
Satoshi Kishimoto, Yusuke Yamauchi
Author Affiliations +
Proceedings Volume 7522, Fourth International Conference on Experimental Mechanics; 75220L (2010) https://doi.org/10.1117/12.851593
Event: Fourth International Conference on Experimental Mechanics, 2009, Singapore, Singapore
Abstract
A new method to measure the spacing and direction in the ordered assembled nanoparticles by using the electron Moiré new method to measure the spacing and direction in the ordered assembled nanoparticles by using the electron Moiré fringes has been developed. In this method an assembled nanoparticle array can be consider as a model grid. When the electron beam was irradiated on the top of the nanoparticles, the amount of secondary electrons per primary electron is quite large. On the other hand, when the electron beam was irradiated on the valley among the neighboring nanoparticles, the amount of secondary electrons per primary electron is smaller. The difference of the generated secondary electrons per a primary electron fabricate periodical bright and dark pattern, which is the electron mesomoiré fringes. Using this method, the spacing and orientation of the assembled nanoparticle array was measured. new method to measure the spacing and direction in the ordered assembled nanoparticles by using the electron Moiré fringes has been developed. In this method an assembled nanoparticle array can be consider as a model grid. When the electron beam was irradiated on the top of the nanoparticles, the amount of secondary electrons per primary electron is quite large. On the other hand, when the electron beam was irradiated on the valley among the neighboring nanoparticles, the amount of secondary electrons per primary electron is smaller. The difference of the generated secondary electrons per a primary electron fabricate periodical bright and dark pattern, which is the electron mesomoiré fringes. Using this method, the spacing and orientation of the assembled nanoparticle array was measured. fringes has been developed. In this method an assembled nanoparticle array can be consider as a model grid. When the electron beam was irradiated on the top of the nanoparticles, the amount of secondary electrons per primary electron is quite large. On the other hand, when the electron beam was irradiated on the valley among the neighboring nanoparticles, the amount of secondary electrons per primary electron is smaller. The difference of the generated secondary electrons per a primary electron fabricate periodical bright and dark pattern, which is the electron mesomoiré fringes. Using this method, the spacing and orientation of the assembled nanoparticle array was measured.
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Satoshi Kishimoto and Yusuke Yamauchi "Meso-moiré fringe observation of nano-particle structures by electron moiré method", Proc. SPIE 7522, Fourth International Conference on Experimental Mechanics, 75220L (14 April 2010); https://doi.org/10.1117/12.851593
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KEYWORDS
Nanoparticles

Nanolithography

Electron beams

Scanning electron microscopy

System on a chip

Americium

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