Holographic femtosecond laser processing

Yoshio Hayasaki

doi:10.1117/12.840974

18 February 2010 Holographic femtosecond laser processing

Yoshio Hayasaki

Proceedings Volume 7584, Laser Applications in Microelectronic and Optoelectronic Manufacturing XV; 75840E (2010) https://doi.org/10.1117/12.840974
Event: SPIE LASE, 2010, San Francisco, California, United States

Abstract

Parallel femtosecond laser processing using a computer-generated hologram (CGH) displayed on a spatial light modulator, called holographic femtosecond laser processing, has advantages of high throughput and high light-use efficiency of the laser pulse energy. We demonstrate two types of the holographic femtosecond laser processing that are implemented with a Fourier transform CGH and a Fresnel transform CGH. We present some demonstrations of twodimensional and three-dimensional parallel laser processing.

Citation Download Citation

Yoshio Hayasaki "Holographic femtosecond laser processing", Proc. SPIE 7584, Laser Applications in Microelectronic and Optoelectronic Manufacturing XV, 75840E (18 February 2010); https://doi.org/10.1117/12.840974

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