MEMS-based fabrication of multiple-degree-of-freedom ionic polymer-metal composite actuators

Zheng Chen; Xiaobo Tan

doi:10.1117/12.847460

9 April 2010 MEMS-based fabrication of multiple-degree-of-freedom ionic polymer-metal composite actuators

Zheng Chen, Xiaobo Tan

Proceedings Volume 7642, Electroactive Polymer Actuators and Devices (EAPAD) 2010; 76420X (2010) https://doi.org/10.1117/12.847460
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2010, San Diego, California, United States

Abstract

Ionic polymer-metal composites (IPMC) are soft actuation materials with promising applications in robotics and biomedical devices. In this paper, a MEMS-based approach is presented for monolithic, batch fabrication of IPMC pectoral fin actuators that are capable of complex deformation. Such an actuator consists of multiple, individually controlled IPMC regions that are mechanically coupled through compliant, passive regions. Prototypes of artificial pectoral fins have been fabricated with the proposed method, and sophisticated deformation modes, including bending, twisting, and cupping, have been demonstrated, which shows the promise of the pectoral fin in robotic fish applications.

Citation Download Citation

Zheng Chen and Xiaobo Tan "MEMS-based fabrication of multiple-degree-of-freedom ionic polymer-metal composite actuators", Proc. SPIE 7642, Electroactive Polymer Actuators and Devices (EAPAD) 2010, 76420X (9 April 2010); https://doi.org/10.1117/12.847460

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available