Advances in the development of the LNE metrological atomic force microscope

Benoit Poyet; Sébastien Ducourtieux

doi:10.1117/12.854201

14 May 2010 Advances in the development of the LNE metrological atomic force microscope

Benoit Poyet, Sébastien Ducourtieux

Proceedings Volume 7718, Optical Micro- and Nanometrology III; 77180U (2010) https://doi.org/10.1117/12.854201
Event: SPIE Photonics Europe, 2010, Brussels, Belgium

Abstract

SPM users need to calibrate their instrument periodically in order to provide some traceable measurements and to improve their measurements capabilities. This calibration task is achieved thanks to standards - 1D or 2D gratings - whose dimensional characteristics have been characterized by a National Metrology Institute. Within this context, LNE is developing a home made metrological Atomic Force Microscope (mAFM) with direct traceable measurement capabilities. This mAFM will be able to calibrate those standards. The measurement volume is about 60 μm for X and Y axis and about 10 μm for Z axis. The expected uncertainty for the tip-sample relative position measurement is in the order of 1 nm. This paper focus on the specific development that have been achieved: a three axis flexure stage with very high guidance capability, an optimized metrology loop and a specific design with four differential dual-pass interferometer that provide an Abbe error below 1nm for the whole measuring volume.

Citation Download Citation

Benoit Poyet and Sébastien Ducourtieux "Advances in the development of the LNE metrological atomic force microscope", Proc. SPIE 7718, Optical Micro- and Nanometrology III, 77180U (14 May 2010); https://doi.org/10.1117/12.854201

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