Blue and red electroluminescence of silicon-rich oxide light emitting capacitors

A. Morales-Sánchez; M. Aceves-Mijares; A. A. González-Fernández; K. Monfil-Leyva; J. Juvert; C. Domínguez-Horna

doi:10.1117/12.854433

17 May 2010 Blue and red electroluminescence of silicon-rich oxide light emitting capacitors

A. Morales-Sánchez, M. Aceves-Mijares, A. A. González-Fernández, K. Monfil-Leyva, J. Juvert, C. Domínguez-Horna

Proceedings Volume 7719, Silicon Photonics and Photonic Integrated Circuits II; 77190N (2010) https://doi.org/10.1117/12.854433
Event: SPIE Photonics Europe, 2010, Brussels, Belgium

Abstract

Electroluminescent properties of thin silicon-rich oxide (SRO) films deposited by low pressure chemical vapor deposition (LPCVD) were studied. The gas flow ratio Ro = N₂O/SiH₄ was changed to obtain different silicon concentrations within the SRO films. After deposition, SRO films were thermally annealed at 1100ºC for 3h in N₂ atmosphere in order to create silicon nanoparticles (Si-nps). Simple capacitive structures like Polysilicon/SRO/n-Si were used for the study. These light emitting capacitors (LECs) show intense blue (~466) and red EL (~685) at room temperature depending on the silicon excess within the SRO films. Electroluminescence in these LECs is obtained at direct current (DC) at both forward and reverse bias conditions. Nevertheless, a stronger whole area EL is obtained when devices are forwardly biased.

Citation Download Citation

A. Morales-Sánchez, M. Aceves-Mijares, A. A. González-Fernández, K. Monfil-Leyva, J. Juvert, and C. Domínguez-Horna "Blue and red electroluminescence of silicon-rich oxide light emitting capacitors", Proc. SPIE 7719, Silicon Photonics and Photonic Integrated Circuits II, 77190N (17 May 2010); https://doi.org/10.1117/12.854433

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