Fabrication of an absorber-coupled MKID detector and readout for sub-millimeter and far-infrared astronomy

Ari-David Brown; Wen-Ting Hsieh; S. Harvey Moseley; Thomas R. Stevenson; Kongpop U-yen; Edward J. Wollack

doi:10.1117/12.857281

15 July 2010 Fabrication of an absorber-coupled MKID detector and readout for sub-millimeter and far-infrared astronomy

Ari-David Brown, Wen-Ting Hsieh, S. Harvey Moseley, Thomas R. Stevenson, Kongpop U-yen, Edward J. Wollack

Proceedings Volume 7741, Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy V; 77410P (2010) https://doi.org/10.1117/12.857281
Event: SPIE Astronomical Telescopes + Instrumentation, 2010, San Diego, California, United States

Abstract

We have fabricated absorber-coupled microwave kinetic inductance detector (MKID) arrays for sub-millimeter and farinfrared astronomy. Each detector array is comprised of λ/2 stepped impedance resonators, a 1.5μm thick silicon membrane, and 380μm thick silicon walls. The resonators consist of parallel plate aluminum transmission lines coupled to low impedance Nb microstrip traces of variable length, which set the resonant frequency of each resonator. This allows for multiplexed microwave readout and, consequently, good spatial discrimination between pixels in the array. The Al transmission lines simultaneously act to absorb optical power and are designed to have a surface impedance and filling fraction so as to match the impedance of free space. Our novel fabrication techniques demonstrate high fabrication yield of MKID arrays on large single crystal membranes and sub-micron front-to-back alignment of the microstrip circuit.

Citation Download Citation

Ari-David Brown, Wen-Ting Hsieh, S. Harvey Moseley, Thomas R. Stevenson, Kongpop U-yen, and Edward J. Wollack "Fabrication of an absorber-coupled MKID detector and readout for sub-millimeter and far-infrared astronomy", Proc. SPIE 7741, Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy V, 77410P (15 July 2010); https://doi.org/10.1117/12.857281

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