Paper
15 July 2010 Compact radiative control structures for millimeter astronomy
Author Affiliations +
Abstract
We have designed, fabricated, and tested compact radiative control structures, including antireflection coatings and resonant absorbers, for millimeter through submillimeter wave astronomy. The antireflection coatings consist of micromachined single crystal silicon dielectric sub-wavelength honeycombs. The effective dielectric constant of the structures is set by the honeycomb cell geometry. The resonant absorbers consist of pieces of solid single crystal silicon substrate and thin phosphorus implanted regions whose sheet resistance is tailored to maximize absorption by the structure. We present an implantation model that can be used to predict the ion energy and dose required for obtaining a target implant layer sheet resistance. A neutral density filter, a hybrid of a silicon dielectric honeycomb with an implanted region, has also been fabricated with this basic approach. These radiative control structures are scalable and compatible for use large focal plane detector arrays.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ari D. Brown, David T. Chuss, James A. Chervenak, Ross M. Henry, S. Harvey Moseley, and Edward J. Wollack "Compact radiative control structures for millimeter astronomy", Proc. SPIE 7741, Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy V, 77412C (15 July 2010); https://doi.org/10.1117/12.858174
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Silicon

Dielectrics

Semiconducting wafers

Antireflective coatings

Ions

Phosphorus

Resistance

Back to Top