Evaluation of mask manufacturing efficiency using mask data rank information

Kokoro Kato; Masakazu Endo; Tadao Inoue; Masaki Yamabe; Shigetoshi Nakatake

doi:10.1117/12.864084

26 May 2010 Evaluation of mask manufacturing efficiency using mask data rank information

Kokoro Kato, Masakazu Endo, Tadao Inoue, Masaki Yamabe, Shigetoshi Nakatake

Proceedings Volume 7748, Photomask and Next-Generation Lithography Mask Technology XVII; 77481N (2010) https://doi.org/10.1117/12.864084
Event: Photomask and NGL Mask Technology XVII, 2010, Yokohama, Japan

Abstract

The photomask cost is becoming one of the challenging issues in the semiconductor industry, as the cost of photomasks has been rising year by year. ASET started Mask D2I (Mask Design, Drawing and Inspection Technology) project with the sponsorship from the NEDO (New Energy and Industrial Technology Development Organization) in 2006 for the purpose of the mask cost reduction. In earlier papers[1-5], we introduced the idea of photomask data prioritization method which is referred to as Mask Data Rank (MDR). We have built our software system to convert Design Intent (DI) to MDR with cooperation of STARC. Then we showed the results of experiments with mask data provided by semiconductor companies. In this paper we show the additional report of mask inspection experiments using real photomasks. Then we show the evaluation results about mask drawing time reduction using MDR flow. Finally we introduce detailed algorithm to extract design intent from analog circuits.

Citation Download Citation

Kokoro Kato, Masakazu Endo, Tadao Inoue, Masaki Yamabe, and Shigetoshi Nakatake "Evaluation of mask manufacturing efficiency using mask data rank information", Proc. SPIE 7748, Photomask and Next-Generation Lithography Mask Technology XVII, 77481N (26 May 2010); https://doi.org/10.1117/12.864084

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available