Paper
20 September 2010 Micro- and nano-tomography at the GKSS Imaging Beamline at PETRA III
A. Haibel, M. Ogurreck, F. Beckmann, T. Dose, F. Wilde, J. Herzen, M. Müller, A. Schreyer, V. Nazmov, M. Simon, A. Last, J. Mohr
Author Affiliations +
Abstract
The unique beam characteristics of PETRA III at DESY promote novel applications for many scientific fields, including imaging applications. For tomography these are techniques like high-speed and in-situ measurements marked by highest density resolutions and spatial resolutions down to the nanometer range. Furthermore, the high coherence enables phase contrast applications in an exceptional way. Therefore, the Imaging Beamline IBL is equipped with two dedicated endstations, one for micro and one for nano tomography. In addition, a very flexible X-ray and light optics concept is implemented. The micro tomography endstation is designed for samples requiring (sub-) micrometer resolution. The technical specifications of the nano tomography endstation aim for a spatial resolution of below 100 nm. The nanometer resolution will be achieved by using different combinations of compound refractive lenses as X-ray optics. The overall setup is designed to be very flexible, which allows also the implementation of other optical elements as well as the application of different magnifying techniques.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. Haibel, M. Ogurreck, F. Beckmann, T. Dose, F. Wilde, J. Herzen, M. Müller, A. Schreyer, V. Nazmov, M. Simon, A. Last, and J. Mohr "Micro- and nano-tomography at the GKSS Imaging Beamline at PETRA III", Proc. SPIE 7804, Developments in X-Ray Tomography VII, 78040B (20 September 2010); https://doi.org/10.1117/12.860852
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Cited by 16 scholarly publications.
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KEYWORDS
Tomography

X-ray optics

X-rays

Sensors

Spatial resolution

Monochromators

Lenses

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