Diamond milling or turning for the fabrication of micro lens arrays: comparing different diamond machining technologies

Sebastian Scheiding; Allen Y. Yi; Andreas Gebhardt; Roman Loose; Lei Li; Stefan Risse; Ramona Eberhardt; Andreas Tünnermann

doi:10.1117/12.874751

14 February 2011 Diamond milling or turning for the fabrication of micro lens arrays: comparing different diamond machining technologies

Sebastian Scheiding, Allen Y. Yi, Andreas Gebhardt, Roman Loose, Lei Li, Stefan Risse, Ramona Eberhardt, Andreas Tünnermann

Author Affiliations +

Proceedings Volume 7927, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV; 79270N (2011) https://doi.org/10.1117/12.874751
Event: SPIE MOEMS-MEMS, 2011, San Francisco, California, United States

Abstract

Diamond-micro milling and ultra-precision free-form turning technologies for fabricating micro lens arrays (MLA) with a large number of lenslets are explained in detail and compared. Besides the programming of the toolpath, correction loops and cutting parameters are presented. Both technologies are compared regarding achievable form deviation, roughness and economic factors like machining time. The paper offers a guideline for ultra-precision machining of micro lens array master molds on planar substrates and curved surfaces.

Citation Download Citation

Sebastian Scheiding, Allen Y. Yi, Andreas Gebhardt, Roman Loose, Lei Li, Stefan Risse, Ramona Eberhardt, and Andreas Tünnermann "Diamond milling or turning for the fabrication of micro lens arrays: comparing different diamond machining technologies", Proc. SPIE 7927, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV, 79270N (14 February 2011); https://doi.org/10.1117/12.874751

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