Silicon TSV interposers for photonics and VLSI packaging

N. Vodrahalli; C. Y. Li; V. Kosenko

doi:10.1117/12.876877

2 March 2011 Silicon TSV interposers for photonics and VLSI packaging

N. Vodrahalli, C. Y. Li, V. Kosenko

Proceedings Volume 7928, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X; 792806 (2011) https://doi.org/10.1117/12.876877
Event: SPIE MOEMS-MEMS, 2011, San Francisco, California, United States

Abstract

Miniaturization, higher performance, and higher bandwidth needs of the electronic industry continue to drive technology innovations through increased levels of integration. Through Silicon Via (TSV) technology along with flip chip technology provides significant improvements over the traditional technologies for packaging VLSI circuits. Silicon Interposers built using TSVs and embedded capacitors provide solutions to the next generation needs of VLSI Packaging. TSV Si interposers also provide a paltform for integrating photonic elements like the laser diodes and optical fibers for next generation high bandwidth VLSI packaging. The presentation describes (i) the TSV technologies developed, (ii) implementation of Si TSV interposer with embedded capacitors for VLSI packaging, and (iii) development of Si TSV interposer for integration of photonics and VLSI subsystems. Reliability results of interposers with embedded capacitors are also presented.

Citation Download Citation

N. Vodrahalli, C. Y. Li, and V. Kosenko "Silicon TSV interposers for photonics and VLSI packaging", Proc. SPIE 7928, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X, 792806 (2 March 2011); https://doi.org/10.1117/12.876877

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available