Ultra-low-power multiplexed electronic driver for high resolution deformable mirror systems

Mark N. Horenstein; Robert Sumner; Preston Miller; Thomas Bifano; Jason Stewart; Steven Cornelissen

doi:10.1117/12.876404

14 February 2011 Ultra-low-power multiplexed electronic driver for high resolution deformable mirror systems

Mark N. Horenstein, Robert Sumner, Preston Miller, Thomas Bifano, Jason Stewart, Steven Cornelissen

Proceedings Volume 7930, MOEMS and Miniaturized Systems X; 79300M (2011) https://doi.org/10.1117/12.876404
Event: SPIE MOEMS-MEMS, 2011, San Francisco, California, United States

Abstract

We present a new multiplexed high-voltage driver architecture that departs from previous MEMS deformable-mirror drivers. Just one D/A converter and one high-voltage amplifier module drive the entire actuator array through a row-column addressing scheme. This approach reduces operational power consumption of a multiple-channel deformable-mirror driver by two orders of magnitude. It can provide for the integration of the deformable mirror and driver into a compact package, reducing driver volume by an order of magnitude. Both of these system modifications are essential for the implementation of MEMS deformable mirrors into space-based adaptive optics systems and other applications.

Citation Download Citation

Mark N. Horenstein, Robert Sumner, Preston Miller, Thomas Bifano, Jason Stewart, and Steven Cornelissen "Ultra-low-power multiplexed electronic driver for high resolution deformable mirror systems", Proc. SPIE 7930, MOEMS and Miniaturized Systems X, 79300M (14 February 2011); https://doi.org/10.1117/12.876404

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