Novel solutions for thin film layer deposition for organic materials

Dietmar Keiper; Michael Long; Markus Schwambera; Markus Gersdorff; Juergen Kreis; Michael Heuken

doi:10.1117/12.876071

3 February 2011 Novel solutions for thin film layer deposition for organic materials

Dietmar Keiper, Michael Long, Markus Schwambera, Markus Gersdorff, Juergen Kreis, Michael Heuken

Proceedings Volume 7956, Advances in Display Technologies; and E-papers and Flexible Displays; 79560I (2011) https://doi.org/10.1117/12.876071
Event: SPIE OPTO, 2011, San Francisco, California, United States

Abstract

Innovative systems for carrier-gas enhanced vapor phase deposition of organic layers offer advanced methods for the precise deposition of complex thin-film layer stacks. The approach inherently avoids potential short-comings from solvent-based polymer deposition and offers new opportunities. The process operates at low pressure (thus avoiding complex vacuum setups), and, by employing AIXTRON's extensive experience in freely scalable solutions, can be adapted to virtually any production process and allows for R&D and production systems alike. Deposition of organic layers and stacks recommends the approach for a wide range of organic small molecule and polymer materials (including layers with gradual change of the composition), for conductive layers, for dielectric layers, for barrier systems, for OLED materials, and surface treatments such as oleophobic / hydrophobic coatings. With the combination of other vapor phase deposition solutions, hybrid systems combining organic and inorganic materials and other advanced stacks can be realized.

Citation Download Citation

Dietmar Keiper, Michael Long, Markus Schwambera, Markus Gersdorff, Juergen Kreis, and Michael Heuken "Novel solutions for thin film layer deposition for organic materials", Proc. SPIE 7956, Advances in Display Technologies; and E-papers and Flexible Displays, 79560I (3 February 2011); https://doi.org/10.1117/12.876071

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