Demonstration of microcantilever-based sensor array with integrated microfluidics

Gregory P. Nordin; Ryan R. Anderson; Stanley J. Ness; Weisheng Hu; Timothy M. Gustafson; Jong Wook Noh; Danny C. Richards; Seunghyun Kim

doi:10.1117/12.884928

3 June 2011 Demonstration of microcantilever-based sensor array with integrated microfluidics

Gregory P. Nordin, Ryan R. Anderson, Stanley J. Ness, Weisheng Hu, Timothy M. Gustafson, Jong Wook Noh, Danny C. Richards, Seunghyun Kim

Author Affiliations +

Proceedings Volume 8018, Chemical, Biological, Radiological, Nuclear, and Explosives (CBRNE) Sensing XII; 80180X (2011) https://doi.org/10.1117/12.884928
Event: SPIE Defense, Security, and Sensing, 2011, Orlando, Florida, United States

Abstract

We report the integration of a nanomechanical sensor consisting of 16 silicon microcantilevers and polydimethylsiloxane (PDMS) microfluidics. With our recently developed in-plane photonic transduction method we routinely achieve microcantilever transduction responsivities in the range of 0.5-1.1 μm^-1, which is comparable to the best reported for the laser reflection readout method used in atomic force microscopy (AFM). Prior work has established that differential surface stress as low as 0.23 mN/m is readily measurable with our arrays. In this paper we show biotin-streptavidin sensing with a differential surface stress of ~2.3 mN/m as a first step toward characterizing integrated microcantilever array/microfluidic sensors.

Citation Download Citation

Gregory P. Nordin, Ryan R. Anderson, Stanley J. Ness, Weisheng Hu, Timothy M. Gustafson, Jong Wook Noh, Danny C. Richards, and Seunghyun Kim "Demonstration of microcantilever-based sensor array with integrated microfluidics", Proc. SPIE 8018, Chemical, Biological, Radiological, Nuclear, and Explosives (CBRNE) Sensing XII, 80180X (3 June 2011); https://doi.org/10.1117/12.884928

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