3D-measurement using a scanning electron microscope with four Everhart-Thornley detectors

Taras Vynnyk; Renke Scheuer; Eduard Reithmeier

doi:10.1117/12.883884

1 June 2011 3D-measurement using a scanning electron microscope with four Everhart-Thornley detectors

Taras Vynnyk, Renke Scheuer, Eduard Reithmeier

Proceedings Volume 8036, Scanning Microscopies 2011: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences; 803615 (2011) https://doi.org/10.1117/12.883884
Event: SPIE Defense, Security, and Sensing, 2011, Orlando, Florida, United States

Abstract

Due to the emerging degree of miniaturization in microstructures, Scanning-Electron-Microscopes (SEM) have become important instruments in the quality assurance of chip manufacturing. With a two- or multiple detector system for secondary electrons, a SEM can be used for the reconstruction of three dimensional surface profiles. Although there are several projects dealing with the reconstruction of three dimensional surfaces using electron microscopes with multiple Everhart-Thornley detectors (ETD), there is no profound knowledge of the behaviour of emitted electrons. Hence, several values, which are used for reconstruction algorithms, such as the photometric method, are only estimates; for instance, the exact collection efficiency of the ETD, which is still unknown. This paper deals with the simulation of electron trajectories in a one-, two- and four-detector system with varying working distances and varying grid currents. For each detector, the collection efficiency is determined by taking the working distance and grid current into account. Based on the gathered information, a new collection grid, which provides a homogenous emission signal for each detector of a multiple detector system, is developed. Finally, the results of the preceding tests are utilized for a reconstruction of a three dimensional surface using the photometric method with a non-lambert intensity distribution.

Citation Download Citation

Taras Vynnyk, Renke Scheuer, and Eduard Reithmeier "3D-measurement using a scanning electron microscope with four Everhart-Thornley detectors", Proc. SPIE 8036, Scanning Microscopies 2011: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences, 803615 (1 June 2011); https://doi.org/10.1117/12.883884

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