Airborne particle generation for optical tweezers by thermo-mechanical membrane actuators

T. Polster; S. Leopold; M. Hoffmann

doi:10.1117/12.886727

5 May 2011 Airborne particle generation for optical tweezers by thermo-mechanical membrane actuators

T. Polster, S. Leopold, M. Hoffmann

Proceedings Volume 8066, Smart Sensors, Actuators, and MEMS V; 80661F (2011) https://doi.org/10.1117/12.886727
Event: SPIE Microtechnologies, 2011, Prague, Czech Republic

Abstract

This article presents a new approach for airborne particle generation for optical tweezers. The used element is a 500 nm thin aluminum nitride membrane with an integrated heating element. Thus the membrane works as thermo-mechanical actor. The membrane device is characterized concerning their mechanical and thermal behavior. Successful airborne particle generation is demonstrated with 10 μm silicon dioxide spheres. They are lifted up some 10th of μm from the membrane surface. The development and test of this device serves as starting point for experiments with optical tweezers in air.

Citation Download Citation

T. Polster, S. Leopold, and M. Hoffmann "Airborne particle generation for optical tweezers by thermo-mechanical membrane actuators", Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 80661F (5 May 2011); https://doi.org/10.1117/12.886727

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